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倾斜沉积“雕塑”薄膜结构参数优化分析: 作者： 齐红基王晴云肖秀娣易葵贺洪波范正修 来源： 光学学报 年份： 2010 文献类型： 期刊 关键词： “雕塑”薄膜模拟退火算法 倾斜沉积技术 结构参数提取薄膜; 描述： 基于双轴双折射薄膜模型,利用在不同入射角度下薄膜对两种偏振态光波透射光谱,同时获得"雕塑"薄膜主轴折射率N1,N2,N3和薄膜厚度d及柱状角β等参数。基于倾斜沉积技术,利用电子束反应蒸发方法

Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique: 作者： 王斌齐红基孙卫何骏赵娇玲王虎候永强 来源： 中国物理B(英文版) 年份： 2014 文献类型： 期刊 关键词： 对称式光学均匀性淀积技术薄膜 沉积技术 均匀性分析雕塑掠射角; 描述： The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.

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