Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

【类型】期刊

【作者】王斌 齐红基 孙卫 何骏 赵娇玲 王虎 候永强 

【刊名】中国物理B(英文版)

【关键词】 对称式 光学均匀性 淀积技术 薄膜 沉积技术 均匀性分析 雕塑 掠射角

【资助项】Project supported by the National Natural Science Foundation of China （Grant No. 61205211）

【摘要】The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.

【年份】2014

【期号】第11期

【页码】556-561

【作者单位】Key Laboratory of Materials for High Power Laser, Shanghai Institute of Oplics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China；University of Chinese Academy of Sciences, Beijing 100049, China

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